pump with vacuum assist

Dry-Prime Pump With Vacuum Assist (also referred to as dry mechanical pump) refers to the pump can begin to pump under atmospheric pressure, and can be pumped directly into the atmosphere to the pump chamber without oil or other working media, and the pump pressure and oil-sealed vacuum pump equivalent or close to the mechanical vacuum pump. The application of dry vacuum pump is extensive, mainly in the following aspects: 1) in the preparation process of polysilicon in low pressure chemical vapor deposition; 2) Semiconductor etching process. Corrosive gases and abrasive particles are often used or generated in these production processes; 3) In addition to some processes that produce particles other than semiconductor processes, it is not expected that particles will be mixed into the pump oil, and it is hoped that particles will be discharged from the pump, then a certain type of dry mechanical vacuum pump can meet the requirements; 4) In the chemical industry, pharmaceutical industry, food industry in the distillation, drying, defoaming, packaging, etc., to prevent pollution caused by organic solvents, suitable for dry vacuum pump; 5) Used as the front pump of the general oil-free clean vacuum system to prevent oil pollution.